A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
نویسندگان
چکیده
منابع مشابه
Dual-stage repetitive control with Prandtl–Ishlinskii hysteresis inversion for piezo-based nanopositioning
The positioning performance of piezo-based nanopositioning systems is limited by dynamic and hysteresis effects in the piezoactuator. Herein, a high-performance, dual-stage repetitive controller (dual-RC) with a feedforward hysteresis compensator is proposed for tracking periodic trajectories, such as the scanning-type motion, in nanopositioning systems. Firstly, a discrete-time dual-RC is crea...
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ژورنال
عنوان ژورنال: MATEC Web of Conferences
سال: 2016
ISSN: 2261-236X
DOI: 10.1051/matecconf/20167701040